Эта статья является препринтом и не была отрецензирована.
О результатах, изложенных в препринтах, не следует сообщать в СМИ как о проверенной информации.
Обзор методов измерения механической прочности тонких плёнок
1. Dedkova, A.A., Florinsky, I.V., Gusev, E.E. et. al., Technique for Analyzing Volumetric Defects Using Digital Elevation Model of a Surface // Russian Journal of Nondestructive Testing, 2021, 57(11), стр. 1000–1007, DOI:10.31857/S01303082211100
2. Fonseca, D. J., & Sequera, M. (2011). On MEMS Reliability and Failure Mechanisms. International Journal of Quality, Statistics, and Reliability, 2011, 1–7. doi:10.1155/2011/820243
3. Microelectromechanical System Sensor Market by Type and Application: Global Opportunity Analysis and Industry Forecast, 2019-202, Allied Market Research
4. C. Li, D. Zhang, G. Cheng & Y. Zhu, Microelectromechanical Systems for Nanomechanical Testing: Electrostatic Actuation and Capacitive Sensing for High-Strain-Rate Testing, Experimental Mechanics volume 60, pages329–343(2020)
5. Nabeel Khan, Mohammed Jalal Ahamed, Design and development of a MEMS butterfly resonator using synchronizing beam and out of plane actuation, Microsystem Technologies volume 26, pages1643–1652(2020)
6. R. A. Coutu Jr, R. S. LaFleur, J. P. K. Walton, L. A. Starman, Thermal Management Using MEMS Bimorph Cantilever Beams, Experimental Mechanics volume 56, pages1293–1303(2016).
7. Dariusz M. Jarza˛ Bek, Michał Milczarek, Szymon Nosewicz, Piotr Bazarnik, Helmut Schift, Size Effects of Hardness and Strain Rate Sensitivity in Amorphous Silicon Measured by Nanoindentation, Metallurgical and Materials Transactions A volume 51, pages1625–1633(2020)
8. Brotzen, F. R. Mechanical Testing of Thin-Films, International Materials Reviews 39 (1), 24–45, 1994.
9. Ding, X. Y.; Ko, W. H.; Mansour, J. M. Residual-Stress and Mechanical-Properties of Boron-Doped P+-Silicon Films, Sensors and Actuators A-Physical 23 (1–3), 866–871, 1990.
10. Read, D. T.; Cheng, Y. W.; Keller, R. R.; McColskey, J. D. Tensile Properties of FreeStanding Aluminum Thin Films, Scripta Materialia 45 (5), 583–589, 2001.
11. Ruud, J. A.; Josell, D.; Spaepen, F.; Greer, A. L. A New Method for Tensile Testing of Thin Films, Journal of Materials Research 8 (1), 112–117, 1993.
12. Espinosa, H. D.; Prorok, B. C.; Peng, B. Plasticity Size Effects in Free-Standing Submicron Polycrystalline FCC Films Subjected to Pure Tension, Journal of the Mechanics and Physics of Solids 52 (3), 667–689, 2004.
13. Haque, M. A.; Saif, M. T. A. Deformation Mechanisms in Free-Standing Nanoscale Thin Films: A Quantitative in situ Transmission Electron Microscope Study, Proceedings of the National Academy of Sciences of the United States of America 101 (17), 6335–6340, 2004.
14. Ruoff, A.L. (1979). The Fracture and Yield Strengths of Diamond, Silicon and Germanium. In: Timmerhaus, K.D., Barber, M.S. (eds) High-Pressure Science and Technology. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-7470-1_194
15. VanLandingham, M. R. Review of Instrumented Indentation, Journal of Research of the National Institute of Standards and Technology 108 (4), 249–265, 2003Loubet, J. L.; Georges, J. M.;
16. Marchesini, O.; Meille, G. Vickers Indentation Curves of Magnesium-Oxide (MgO), Journal of Tribology-Transactions of the ASME 106 (1),3–48, 1984.
17. Doerner, M. F.; Nix, W. D. A Method for Interpreting the Data from Depth-Sensing Indentation Measurements, Journal of Materials Research 1 (4), 601–616, 1986.
18. Oliver, W. C.; Pharr, G. M. An Improved Technique for Determining Hardness and Elastic-Modulus Using Load and Displacement Sensing Indentation Experiments, Journal of Materials Research 7 (6), 1564–1583, 1992.
19. King, R. B.; Osullivan, T. C. Sliding Contact Stresses in A Two-Dimensional Layered Elastic Half-Space, International Journal of Solids and Structures 23 (5), 581–597, 1987.
20. Tsui, T. Y.; Oliver, W. C.; Pharr, G. M. Influences of Stress on the Measurement of Mechanical Properties Using Nanoindentation .1. Experimental Studies in an Aluminum Alloy, Journal of Materials Research 11 (3), 752–759, 1996.
21. Bolshakov, A.; Oliver, W. C.; Pharr, G. M. Influences of Stress on the Measurement of Mechanical Properties Using Nanoindentation .2. Finite Element Simulations, Journal of Materials Research 11 (3), 760–768, 1996.
22. Hainsworth, S. V.; Chandler, H. W.; Page, T. F. Analysis of Nanoindentation LoadDisplacement Loading Curves, Journal of Materials Research 11 (8), 1987–1995, 1996. 21.
23. Berriche, R. Vickers Hardness from Plastic Energy, Scripta Metallurgica et Materialia 32 (4), 617–620, 1995.
24. Li, X. D.; Bhushan, B. A Review of Nanoindentation Continuous Stiffness Measurement Technique and Its Applications, Materials Characterization 48 (1), 11–36, 2002.
25. Юлия Хохлова, Максим Хохлов, Индентирование от макро- до нано- и примеры исследований свойств материалов с особой структурой, Paton Electric Welding Institute of NAS of Ukraine, DOI:10.13140/RG.2.2.22072.96008
26. Игнатович С. Р. и др. Определение микромеханических характеристик поверхности материалов с использованием наноиндентометра «Микрон-гамма» // Вестник Харьковского национального авт.-дор. ун-та. 2008. Т. 42. С. 86-90.
27. ГОСТ Р 8.748-2011 «Государственная система обеспечения единства измерений. Металлы и сплавы. Измерение твердости и других характеристик материалов при инструментальном индентировании. Часть 1. Метод испытаний»
28. W.C. Oliver, G.M. Pharr «Mesurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology» J. Mater. Res., Vol. 19, No. 1, Jan 2004.
29. Dariusz M. Jarza˛ Bek, Michał Milczarek, Szymon Nosewicz, Piotr Bazarnik, Helmut Schift, Size Effects of Hardness and Strain Rate Sensitivity in Amorphous Silicon Measured by Nanoindentation, Metallurgical and Materials Transactions A volume 51, pages1625–1633(2020)
30. Freund, L. B.; Suresh, S. Thin Film Materials: Stress, Defect Formation and Surface Evolution; Cambridge University Press: Cambridge, UK, 2003.
31. Ohring, M. Materials Science of Thin Films, Deposition and Structure; Academic Press: San Diego, CA, 2002.
32. Nix, W. D. Mechanical-Properties of Thin-Films, Metallurgical Transactions A-Physical Metallurgy and Materials Science 20 (11), 2217–2245, 1989.
33. Jankowski, A. F.; Tsakalakos, T. Effects of Deflection on Bulge Test Measurements of Enhanced Modulus in Multilayered Films, Thin Solid Films 291 243–247, 1996.
34. Small, M. K.; Nix, W. D. Analysis of the Accuracy of the Bulge Test in Determining the Mechanical-Properties of Thin-Films, Journal of Materials Research 7 (6), 1553–1563, 1992.
35. Liechti, K. M.; Shirani, A. Large-Scale Yielding in Blister Specimens, International Journal of Fracture 67 (1), 21–36, 1994.
36. Donald A.Wiegand,Brett Redingius, Kevin Ellis, ClaireLeppard, Pressure and friction dependent mechanical strength – cracks and plastic flow, International Journal of Solids and Structures, Volume 48, Issues 11–12, 1 June 2011, Pages 1617-1629, https://doi.org/10.1016/j.ijsolstr.2011.01.025
37. Gusev, E. & Dedkova, A. & A., Djuzhev. (2018). Investigating Mechanical Strength of Multilayer Membranes for MEMS Converters of Physical Quantities. Nanoindustry Russia. 538-541. 10.22184/1993-8578.2018.82.538.541.
38. Jinling Yang, João Gaspar, and Oliver Paul, Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films from the Load-Deflection of Long Si3N4 and SiO2/Si3N4 Diaphragms, Journal of Microelectromechanical Systems (Volume: 17, Issue: 5, Oct. 2008)
39. Ramnath Venkatraman and John C. Bravman, Separation of film thickness and grain boundary strengthening effects in Al thin films on Si // J. Mater. Res., Vol. 7, No. 8, p. 2040-2048, Aug 1992, DOI: https://doi.org/10.1557/JMR.1992.2040
40. Djuzhev N., Gusev E., Dedkova, A. et. al. (2020). Experimental Determination of Mechanical Properties of the Anode Cell of an X-Ray Lithograph. Technical Physics. 65. 1755-1759. 10.1134/S1063784220110055.
41. Petersen, K. E.; Guarnieri, C. R. Youngs Modulus Measurements of Thin-Films Using Micromechanics, Journal of Applied Physics 50 (11), 6761–6766, 1979.
42. Osterberg, P. M.; Senturia, S. D. M-TEST: A Test Chip for MEMS Material Property Measurement Using Electrostatically Actuated Test Structures, Journal of Microelectromechanical Systems 6 (2), 107–118, 1997.
43. Weihs, T. P.; Hong, S.; Bravman, J. C.; Nix, W. D. Mechanical Deflection of Cantilever Microbeams – A New Technique for Testing the Mechanical-Properties of Thin-Films, Journal of Materials Research 3 (5), 931–942, 1988.
44. Mönig, R.; Keller, R. R.; Volkert, C. A. Thermal Fatigue Testing of Thin Metal Films, Review of Scientific Instruments 75 (11), 4997–5004, 2004
45. Keller, R. R.; Geiss, R. H.; Cheng, Y.-W.; Read, D. T. IMECE2004-61291: Microstructure Evolution During Alternating-Current-Induced Fatigue, in Proceedings of the International Mechanical Engineering Conference and Exposition 2004; American Society of Mechanical Engineers: 2004; pp. 107–112.
46. Geiss, R. H.; Read, D. T.; Keller, R. R. TEM Study of Dislocation Loops in Deformed Aluminium Films, Microscopy and Microanalysis 11 (S02), 1870–1871, 2005.
47. Keller, R. R.; Geiss, R. H.; Barbosa, N.; Slifka, A. J.; Read, D. T. Strain-Induced Grain Growth During Rapid Thermal Cycling of Aluminum Interconnects, Metallurgical and Materials Transactions A-Physical Metallurgy and Materials Science 38A (13), 2263– 2272, 2007.
48. Gusev, E. E., Borisova, A. V., Dedkova, A. A., Salnikov, A. A., Kireev, V. Y., The Effect of Ion Beam Etching on Mechanical Strength Multilayer Aluminum Membranes // 2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus), DOI:10.1109/eiconrus.2019.8657243
49. Vlasov, T. Civinskaya and A. Shahnov, Analysis of the influence of the shape of the membrane on the mechanical strength and stability of the parameters of MEMS pressure sensors // MES-2016
50. M.G. Mueller, M. Fornabaio, G. Zagar, A. Mortensen, Microscopis strength of silicon partiles in an aluminium-silicon alloy // Acta Materialia, Volume 105, 15 February 2016, Pages 165-175, DOI: 10.1016/j.actamat.2015.12.006
51. Clemens, B.M., Kung, H. & Barnett, S.A. Structure and Strength of Multilayers. MRS Bulletin 24, 20–26 (1999). https://doi.org/10.1557/S0883769400051502
52. M.A. Munoz Morris, I. Gutierrez-Urrutia, D.G. Morris, The effect of geometrically necessary dislocations on grain refinement during severe plastic deformation and subsequent annealing of Al–7% Si // Materials Science and Engineering A 493 (2008) 141–147, DOI: 10.1016/j.msea.2007.07.096
